300 mm cleanroom to get new equipment in 2015

The 41.02 building’s cleanroom, which inaugurated a third extension this summer dedicated to 300 mm microelectronics activities, now offers some 2,200 sq. m of research space. The new 500 sq. m space will house new microelectronics fabrication resources such as deposition and thin-layer etching equipment.
CEA-Leti, which is managing the procurement process, hopes to begin installing and using the new equipment over the course of 2015.
The 41.02 building’s clean room has never shut down—not even during the colossal construction work to build the extension, which included reinforcing the building’s steel frame and installing a new air delivery plenum and air recycling units on the building’s façade
 

Contact: olivier.demolliens@cea.fr

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