Quantum computing: progress toward silicon-28

Since 2014, several scientific articles have presented the silicon-28 isotope as a good material for spin qubits for quantum computing. However, researchers had yet to produce the material in a CMOS environment, which uses natural silicon containing 4.7% isotope 29—not as suitable for qubits.

INAC and Leti recently made a first step forward with the assistance of a Russian laboratory* and Air Liquide. Using CVD to deposit isotope-28-enriched silane on a standard 300 mm wafer, the researchers obtained a 30 nm to 60 nm layer of 99.992% pure silicon-28.

The surface is smooth enough to withstand subsequent fabrication processes. The researchers used this new material to develop a volume-manufacturing process for the fabrication of spin qubits. The research was conducted under the EU MOS-Quito project**.

*Institute of Chemistry of High Purity Substances
**MOS-based quantum information technology

Contact: marc.sanquer@cea.fr

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