Upstream Technology Platform makes suspended graphene components

Despite its two-dimensional structure, graphene does not readily lend itself to the fabrication of MEMS and NEMS components using conventional microelectronics methods. A Ph.D. student at IMEP-LAHC decided to tackle the problem by making suspended graphene bridges with controlled dimensions and electrical contacts using processes that can be transferred to large surfaces.
She achieved this by carefully controlling the process of eliminating the carbon residue from the resins used for the transfer, and resolving the bonding problems that occur when freeing the graphene bridges. That resulted in process yields of greater than 90%.
Ultimately, the suspended structures could be used in deformation, mass, and vibration sensors. An article on the research is forthcoming.
 

Contact: mouis@minatec.inpg.fr

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